High-density individually addressable platinum nanoelectrodes for biomedical applications

Abstract

3-D vertical nanoelectrode arrays (NEAs) have found applications in several biomedical and sensing applications, including high-resolution neuronal excitation and measurement and single-molecule electrochemical biosensing. There have been several reports on high-density nanoelectrodes in recent years, with the filling ratio of electrodes reaching close to 0.002 (assuming the electrode diameter of 200 nm and pitch of 4 μm). Still, it is well below the nanowire filling ratio required to form interconnected neuronal networks, i.e., more than 0.14 (assuming the electrode diameter of 200 nm and pitch of 1.5 μm). Here, we employ a multi-step, large-area electron beam lithography procedure along wi..